Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning
Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning
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DOI：
10.1364/oe.19.017336
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发表时间：
2011-08-29
期刊：
影响因子：
3.8
通讯作者：
Amann, M. -C.
中科院分区：
文献类型：
--
作者：
Gierl, C.;Gruendl, T.;Amann, M. -C.
首次在1550nm范围内实现了102nm单模波长调谐的垂直腔面发射激光器（VCSEL）。在整个调谐范围内，光纤耦合光输出功率最大为3.5mW，最大输出功率为bbb20 mw。侧模抑制比为45dB。波长调谐是通过表面微加工制造的镜面膜的微电子机械驱动实现的，用于片上批量生产。镜面膜由低温（< 100℃）等离子体增强化学气相沉积（PECVD）沉积的低成本介电材料（SiOx/SiNy）组成。(C) 2011美国光学学会
For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5mW and is > 2mW over the entire tuning range. The sidemode suppression ratios are > 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100 degrees C) Plasma Enhanced Chemical Vapor Deposition (PECVD). (C) 2011 Optical Society of America