A fully electronic microfabricated gas chromatograph with complementary capacitive detectors for indoor pollutants
A fully electronic microfabricated gas chromatograph with complementary capacitive detectors for indoor pollutants
复制标题
DOI：
10.1038/micronano.2015.49
复制
发表时间：
2016-02-29
影响因子：
7.9
通讯作者：
Gianchandani, Yogesh B.
中科院分区：
文献类型：
--
作者：
Qin, Yutao;Gianchandani, Yogesh B.
本文报道了一个完整的微型气相色谱（μ GC）系统，其中所有的组件是光刻微加工和电子接口。这些组件包括一个双向Knudsen泵、一个预浓缩器、分离柱和一对电容式气体检测器;它们共同组成了iGC3.c2系统。该系统的所有流体部件都是由一个共同的三掩模光刻工艺制造的。Knudsen泵是一种热分子泵，可为μ GC提供气流，而无需任何运动部件。嵌入分离柱中的薄膜加热器允许温度编程。电容检测器提供互补的响应模式，增强蒸汽识别和解析共洗脱峰。将组件组装在印刷电路板上后，系统的占地面积为8 x 10 cm（2）。使用室内空气作为载气，该系统用于实验演示19种化学品的分析，浓度水平为百万分之一（p. p.m.）。和十亿分之一（p.p.b.）。测试的化学品包括烷烃、芳烃、醛、卤代烃和萜烯。这组化学品代表了各种常见的室内空气污染物，其中苯，甲苯和二甲苯（BTX）特别令人感兴趣。
This paper reports a complete micro gas chromatography (mu GC) system in which all the components are lithographically microfabricated and electronically interfaced. The components include a bi-directional Knudsen pump, a preconcentrator, separation columns and a pair of capacitive gas detectors; together, these form the iGC3.c2 system. All the fluidic components of the system are fabricated by a common three-mask lithographic process. The Knudsen pump is a thermomolecular pump that provides air flow to the mu GC without any moving parts. The film heaters embedded in the separation columns permit temperature programming. The capacitive detectors provide complementary response patterns, enhancing vapor recognition and resolving co-eluting peaks. With the components assembled on printed circuit boards, the system has a footprint of 8 x 10 cm(2). Using room air as the carrier gas, the system is used to experimentally demonstrate the analysis of 19 chemicals with concentration levels on the order of parts per million (p.p.m.) and parts per billion (p.p.b.). The tested chemicals include alkanes, aromatic hydrocarbons, aldehydes, halogenated hydrocarbons and terpenes. This set of chemicals represents a variety of common indoor air pollutants, among which benzene, toluene and xylenes (BTX) are of particular interest.