Numerical simulation of partially coherent broadband optical imaging using the finite-difference time-domain method.

Numerical simulation of partially coherent broadband optical imaging using the finite-difference time-domain method.
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DOI:
10.1364/ol.36.001596
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发表时间:
2011-05-01
期刊:
影响因子:
3.6
通讯作者:
Backman V
Backman V
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Çapoğlu İR;White CA;Rogers JD;Subramanian H;Taflove A;Backman V

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光学系统的严格数值模拟已经在从生物光子学到光刻的各种研究领域引起了人们的兴趣。我们报道了部分相干非偏振照明宽带光学成像系统的全矢量电磁数值模拟。使用时域有限差分(FDTD)数值方法计算来自样品的光的散射。将几何光学原理应用于散射光以获得像平面处的强度分布。多层对象空间也支持我们的算法。第一次,数值FDTD计算直接比较,并显示出同意与宽带实验显微镜的结果。
Rigorous numerical modeling of optical systems has attracted interest in diverse research areas ranging from biophotonics to photolithography. We report the full-vector electromagnetic numerical simulation of a broadband optical imaging system with partially-coherent and unpolarized illumination. The scattering of light from the sample is calculated using the finite-difference time-domain (FDTD) numerical method. Geometrical optics principles are applied to the scattered light to obtain the intensity distribution at the image plane. Multilayered object spaces are also supported by our algorithm. For the first time, numerical FDTD calculations are directly compared to and shown to agree well with broadband experimental microscopy results.