Development of Cutting Device with Enlargement Mechanism of Displacement
Development of Cutting Device with Enlargement Mechanism of Displacement
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DOI：
10.1299/jamdsm.2.474
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发表时间：
2007
影响因子：
0.9
通讯作者：
Y. Morimoto;Y. Ichida;R. Sato;Yukio Ohori
中科院分区：
文献类型：
--
作者：
Y. Morimoto;Y. Ichida;R. Sato;Yukio Ohori
为了实现刀具从纳米到毫米的定位，研制了一种由PZT驱动的放大机构驱动的新型切割装置。本文介绍了一种新研制的由液室、PZT装置和刀具工作台组成的扩径机构的机械原理。并对所研制的机构的基本性能进行了评价。研制的装置比原来的PZT放大幅度提高了4倍。动态特性显示直流频率为50赫兹，足以实现非圆切割。利用所研制的机构加工了非圆轮廓。采用重复控制法，得到的轮廓度精度稳定在±1.3μm。
A new cutting device driven by an enlargement mechanism with a PZT drive has been developed to realize positioning the cutting tool from nm to mm. In this study, the mechanical principal of a newly developed enlargement mechanism consisting of fluid chamber, a PZT device, and cutting tool stage is reported. The basic performances of the developed mechanism are also evaluated. This developed device demonstrates that the magnitude of enlargement reaches 4 times of stroke than the original one of the PZT. The dynamic characteristics show DC to 50 Hz which is enough frequency response to realize the non-circle cutting. The non-circle profile is machined by the developed mechanism. The profile accuracy obtained settles in ±1.3μm by the repetitive control method.