Reflector atomic hydrogen source: A method for producing pure atomic hydrogen in ultrahigh vacuum
Reflector atomic hydrogen source: A method for producing pure atomic hydrogen in ultrahigh vacuum
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反射器原子氢源：超高真空制备纯原子氢的方法
DOI：
10.1116/1.578647
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发表时间：
1993
期刊：
影响因子：
--
通讯作者：
J. Yates
中科院分区：
文献类型：
--
作者：
K. Bornscheuer;S. Lucas;W. J. Choyke;W. Partlow;J. Yates
钨丝原子氢源放置在一个热熔H2分子束已结合低温冷却的耐热玻璃反射器。这种安排允许通过非视线路线有效地生产和转移原子氢到样品表面。这种安排消除了样品的大部分辐射加热。在超高真空系统中，在不产生过多气体负荷的情况下，可以在灯丝区域实现高的局部H2气体密度和原子氢生成率。本研究使用硅（100）晶体样品。间接源保护样品免受热钨丝可能产生的金属污染，并有效地仅向样品提供原子和分子氢。这种排列的效率已被定量地与原子氢的视线灯丝源进行了比较。
A tungsten filament atomic hydrogen source placed in an effusive H2 molecular beam has been combined with a cryogenically cooled Pyrex reflector. This arrangement permits efficient production and transfer of atomic hydrogen to a sample surface by a non‐line‐of‐sight route. The arrangement eliminates most radiation heating of the sample. With the beam source, high local H2 gas densities and atomic hydrogen production rates in the filament region may be achieved without producing excessive gas loads in an ultrahigh vacuum system. A silicon(100) crystal sample was used in this study. The indirect source protects the sample from possible metal contamination evolving from the hot tungsten filament, and efficiently delivers only atomic and molecular hydrogen species to the sample. The efficiency of this arrangement has been quantitatively compared to a line‐of‐sight filament source of atomic hydrogen.