Effect of oxygen flow ratio on the wetting behavior, microstructure and mechanical properties of CeO2−x coatings prepared by magnetron sputtering
Effect of oxygen flow ratio on the wetting behavior, microstructure and mechanical properties of CeO2−x coatings prepared by magnetron sputtering
复制标题
DOI：
10.1016/j.surfcoat.2016.12.055
复制
发表时间：
2017-06
影响因子：
5.4
通讯作者：
Zhenfu Shi;P. Shum;Zhifeng Zhou;L. Li
中科院分区：
文献类型：
--
作者：
Zhenfu Shi;P. Shum;Zhifeng Zhou;L. Li
在这项研究中，氧化铈（CeO2−x）涂层是在Ar和O2的混合气体中通过磁控溅射制备的。系统研究了氧气流量比（fO2）对CeO2− x涂层表面形貌、润湿性、化学成分、显微结构和力学性能的影响。结果表明，所有CeO2− x涂层均表现出光滑的表面和类似的润湿行为，具有疏水性。水接触角稳定在100°左右。不同的氧流量比和过量的表面晶格氧的存在下，导致疏水性略有下降的表面化学变化。X射线衍射（XRD）分析表明，在纯Ar中生长的涂层表现出弱的结晶峰。而氧掺杂后，CeO2− x薄膜晶化为立方CeO2相，具有（111）择优取向，且随着fO2的增加，CeO2− x薄膜的峰强度逐渐降低。TEM研究揭示了沉积涂层的面心立方（fcc）晶体特征，并且获得的快速傅立叶变换（FFT）图案证实了在56%fO2下沉积的涂层之间的无序晶体结构。当fO2浓度为7%时，涂层的硬度和弹性模量分别达到18.1 GPa和190.2 GPa，随着fO2浓度的增加，涂层的硬度和弹性模量略有下降。
In this study, cerium oxide (CeO2−x) coatings were prepared by magnetron sputtering in a gas mixture of Ar and O2. The effect of oxygen flow ratio (fO2) on the surface morphology, wetting behavior, chemical composition, microstructure and mechanical properties of CeO2−xcoating were systematically investigated. The results showed that all CeO2−xcoatings exhibited smooth surfaces and similar wetting behaviors with a hydrophobic feature. The water contact angle stabilized around 100°. Surface chemistry varied with different oxygen flow ratios and the presence of excess surface lattice oxygen led to a slight decrease in hydrophobicity. X-ray diffraction (XRD) analyses showed that the coating grown in pure Ar exhibited weak crystalline peaks. While after the incorporation of oxygen, CeO2−xcoatings crystallized in a cubic CeO2phase with preferred (111) orientation, and the peak intensity gradually decreased with increasingfO2. TEM study revealed the face-centered cubic (fcc) crystalline feature of deposited coatings and obtained Fast Fourier Transformation (FFT) pattern confirmed the disordered crystalline structure among the coating deposited at 56%fO2. The hardness and elastic modulus of the coating could achieve ~ 18.1 GPa and ~ 190.2 GPa when deposited at 7%fO2, then decreased slightly with further increasingfO2.