Harutaka Mekaru, Yuichi Utsumi, Tadashi Hattori: "Effects of Synchrotron Radiation Spectrum Energy on Polymetyl Methacrylate Photosensitivity to Deep X-ray Lithography"Japan Society of Applied Physics. Vol.42, No.6B. 3807-3810 (2003)

Harutaka Mekaru, Yuichi Utsumi, Tadashi Hattori: "Effects of Synchrotron Radiation Spectrum Energy on Polymetyl Methacrylate Photosensitivity to Deep X-ray Lithography"Japan Society of Applied Physics. Vol.42, No.6B. 3807-3810 (2003)
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Harutaka Mekaru、Yuichi Utsumi、Tadashi Hattori:“同步辐射光谱能量对聚甲基丙烯酸甲酯对深 X 射线光刻光敏性的影响”日本应用物理学会。

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