Takeshi AOKI,Kazuo FUKASAWA,Yasuo NISHIKAWA,and Nobuo Mikoshiba: "A Novel Impedance-Matching Method for Plasma Processing" Jpn. J.Appl. Phys.(Submitted to).
Takeshi AOKI,Kazuo FUKASAWA,Yasuo NISHIKAWA,and Nobuo Mikoshiba: "A Novel Impedance-Matching Method for Plasma Processing" Jpn. J.Appl. Phys.(Submitted to).
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Takeshi AOKI、Kazuo FUKASAWA、Yasuo NISHIKAWA 和 Nobuo Mikoshiba:“一种用于等离子体处理的新型阻抗匹配方法”Jpn。
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