Cantilever Probe Integrated with Light-Emitting Diode, Waveguide, Aperture, and Photodiode for Scanning Near-Field Optical Microscope.
Cantilever Probe Integrated with Light-Emitting Diode, Waveguide, Aperture, and Photodiode for Scanning Near-Field Optical Microscope.
复制标题
集成发光二极管、波导、孔径和光电二极管的悬臂探针，用于扫描近场光学显微镜。
DOI：
10.1143/jjap.39.7150
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发表时间：
2000
期刊：
影响因子：
--
通讯作者：
K. Hane
中科院分区：
文献类型：
--
作者：
M. Sasaki;Ko;K. Hane
介绍了一种集成了发光二极管、波导、光阑和光电二极管的微加工扫描近场光学显微镜（SNOM）探头。该探头包括Si悬臂上SNOM所需的所有光学元件。通过使用a-Si作为芯层和SiO2作为包层，用于制造波导的工艺与用于制造光电二极管的工艺兼容。确认光沿着具有大曲率的波导路径传输。所获得的SNOM图像显示出优于200 nm的空间分辨率。
A microfabricated scanning near-field optical microscope (SNOM) probe integrated with a light-emitting diode, waveguide, aperture, and photodiode is described. This probe includes all optical elements necessary for SNOM on the Si cantilever. By using a-Si as the core layer and SiO2 as the cladding layer, the process for fabricating the waveguide is compatible with that for fabricating the photodiode. The light is confirmed to transmit along the waveguide route with the large curvature. The obtained SNOM image shows a spatial resolution better than 200 nm.