Elimination of nonlinearity in sigma delta MEMS accelerometer
Elimination of nonlinearity in sigma delta MEMS accelerometer
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DOI：
10.1109/icsens.2015.7370228
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发表时间：
2015-11
期刊：
影响因子：
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通讯作者：
Yixing Chu;Yunfeng Liu;Jingxin Dong;B. Chi
中科院分区：
文献类型：
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作者：
Yixing Chu;Yunfeng Liu;Jingxin Dong;B. Chi
本文提出了一种通过保持质量块在几何对称位置（零位）上固定来消除Σ-Δ MEMS加速度计非线性的方法。关于Σ-Δ MEMS加速度计的已公布架构未能在非零静态输入的情况下将检验质量块维持在零位置处。该加速度计系统由SOG工艺的敏感元件和2 P4 M 0.35μm CHART CMOS工艺的ASIC组成。ASIC中的电路实现产生激励信号以感测输入加速度和反馈信号以形成静电反馈力。采用时分复用技术，使激励和反馈信号同时作用于三个板传感元件。SIMULINK仿真和测试结果均表明，在一定范围内，不同的静态输入下，检测质量块均保持在零位。非线性度为0.065%，本底噪声为10μg，输入范围为±3g。
This paper presents a method of eliminating nonlinearity in sigma delta MEMS accelerometer by keeping the proof mass fixed at the geometrically symmetrical position (the zero position). Published architectures on sigma delta MEMS accelerometer fail to maintain the proof mass at the zero position with nonzero static input. The output voltage is nonlinear to the input because of the displacement The proposed accelerometer system consists of sense element fabricated in SOG process and ASIC in 2P4M 0.35μm CHART CMOS process. Circuit implementations in ASIC generate excitation signal to sense the input acceleration and feedback signal to form electrostatic feedback force. Time division multiplexing is applied so that excitation and feedback signal can work simultaneously on the three plates sense element Both simulations with SIMULINK and test results show that the proof mass is maintained at the zero position with different static input within the range. A nonlinearity of 0.065%, 10μg noise floor and an input range of about ±3g are achieved.