An integrated thin-film thermo-optic waveguide beam deflector
An integrated thin-film thermo-optic waveguide beam deflector
复制标题
集成薄膜热光波导光束偏转器
DOI：
10.1063/1.126323
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发表时间：
2000
期刊：
影响因子：
--
通讯作者：
Ray T. Chen
中科院分区：
文献类型：
--
作者：
Suning Tang;Bulang Li;Xinghua Han;J. Taboada;Chiou;Jin Ha Kim;Lin Sun;Ray T. Chen
我们已经证明了一个薄膜热光光束偏转器在三层光平面波导的操作。所制造的波导光束偏转器由薄膜SiO2底部包覆层、薄膜聚合物顶部包覆层以及交替定位的薄膜聚合物和二氧化硅微棱镜作为引导层组成。光束偏转是通过热光效应实现的，该热光效应导致聚合物和二氧化硅相对于温度变化的相反折射率变化。对于在632.8 nm波长处具有7.0 mm相互作用长度的制造的器件，测量的偏转灵敏度为0.06°/°C。
We have demonstrated the operation of a thin-film thermo-optical beam deflector in a three-layer optical planar waveguide. The fabricated waveguide beam deflector consists of a thin-film SiO2 bottom cladding layer, a thin-film polymer top cladding layer, and alternatively positioned thin-film polymer and silica microprisms as the guiding layer. The beam deflection is achieved through the thermo-optic effect that results in opposed index changes in polymer and silica with respect to temperature changes. The measured deflection sensitivity is 0.06°/°C, for the fabricated device with a 7.0 mm interaction length at the wavelength of 632.8 nm.