Floating-type Compact Low-energy Ion Gun
Floating-type Compact Low-energy Ion Gun
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浮动式紧凑型低能量离子枪
DOI：
10.3131/jvsj.43.1126
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发表时间：
2000
期刊：
影响因子：
--
通讯作者：
Yoshizo Sakuma
中科院分区：
文献类型：
--
作者：
T. Matsutani;K. Iwamoto;T. Nagatomi;Y. Kimura;Y. Takai;R. Shimizu;R. Aihara;Yoshizo Sakuma
研制了一台漂浮式低能离子枪，可在高电流强度下产生100500 eV离子。这种离子枪由一个永久磁铁辅助的电子撞击型电离室、一个引出器和一个圆柱形延缓浸没透镜组成。对该枪进行了评估，得出了100 eV电流强度为1.81μA(电流密度为7.9μA/cm~2)的典型性能水平。整个系统由外径小于3.3厘米的电离室和长度为24厘米的透镜系统组成。传统的表面分析仪器通过ICF 70扁平法兰连接。
A floating-type low-energy ion gun (FLIG) producing 100500 eV ions at a high current intensity has been developed. This ion gun consists of a permanent magnet-aided electron impact-type ionization cell, an extractor, and a cylindrical retarding immersion lens. The gun was assessed and produced typical performance levels of current intensities of 1.81 μA (current density of 7.9 μA/cm2) for 100 eV. The entire system has been compactly constructed with an ionization cell that has an outer diameter of less than 3.3 cm and a lens system that has a length of 24 cm. Conventional surface analytical instruments are attached via an ICF 70 Conflat flange.