Optimal Feedback Control Method using Magnetic Force for Crystal Growth Dynamics
Optimal Feedback Control Method using Magnetic Force for Crystal Growth Dynamics
复制标题
利用磁力实现晶体生长动力学的最优反馈控制方法
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
T. Hashimoto
中科院分区：
文献类型：
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作者：
T. Hashimoto
提出了半导体材料晶体生长动力学的磁力最优反馈控制方法。所考虑的系统模型由连续性方程、动量方程、能量方程、质量输运方程和磁感应方程描述。滚动域控制是一种最优反馈控制，它以具有移动的起始时刻和终止时刻的性能指标来优化有限未来的控制性能。本研究的目的是提出一种对半导体材料晶体生长动力学进行滚动控制的方法。关键词-最优控制、晶体生长、过程控制
This paper proposes the optimal feedback control method using magnetic force for crystal growth dynamics of semiconductor materials. The system model considered here is described by the continuity, momentum, energy, mass transport, and magnetic induction equations. Receding horizon control is a kind of optimal feedback control in which the control performance over a finite future is optimized with a performance index that has a moving initial time and terminal time. The objective of this study is to propose a receding horizon control method for crystal growth dynamics of semiconductor materials. Keywords-Optimal control, crystal growth, process control