A Latin-cross-shaped integrated resonant cantilever with second torsion-mode resonance for ultra-resoluble bio-mass sensing
A Latin-cross-shaped integrated resonant cantilever with second torsion-mode resonance for ultra-resoluble bio-mass sensing
复制标题
DOI：
10.1088/0960-1317/18/3/035028
复制
发表时间：
2008-03
影响因子：
2.3
通讯作者：
X. Xia;Zhixiang Zhang;Xinxin Li
中科院分区：
文献类型：
--
作者：
X. Xia;Zhixiang Zhang;Xinxin Li
提出了微悬臂梁生物传感器的二次扭转模式谐振，以获得超高的质量称重灵敏度和分辨率。通过提高谐振频率和Q因子，高模态扭转谐振有利于提高质量传感性能。第一次，拉丁十字形的第二模式谐振悬臂梁的结构和优化设计的信号读出和谐振激励元件。该悬臂梁传感器采用硅微机械加工技术制作。将横向压阻式传感元件和特定形状的谐振激励回路成功地集成在悬臂梁中。甲胎蛋白（AFP）抗体-抗原特异性结合用于传感实验。所提出的悬臂梁传感器的设计具有显着优越的上级灵敏度，以前报道的第一扭转模式之一。分析后与Allan方差算法，它可以很容易地嵌入到传感系统中，拉丁十字形的第二扭转模式的谐振悬臂梁进行评估与超高的质量分辨率。因此，高性能集成微传感器在现场生物分子检测中具有广阔的应用前景。
Second torsion-mode resonance is proposed for microcantilever biosensors for ultra-high mass-weighing sensitivity and resolution. By increasing both the resonant frequency and Q-factor, the higher mode torsional resonance is favorable for improving the mass-sensing performance. For the first time, a Latin-cross-shaped second-mode resonant cantilever is constructed and optimally designed for both signal-readout and resonance-exciting elements. The cantilever sensor is fabricated by using silicon micromachining techniques. The transverse piezoresistive sensing element and the specific-shaped resonance-exciting loop are successfully integrated in the cantilever. Alpha-fetoprotein (AFP) antibody–antigen specific binding is implemented for the sensing experiment. The proposed cantilever sensor is designed with significantly superior sensitivity to the previously reported first torsion-mode one. After analysis with an Allan variance algorithm, which can be easily embedded in the sensing system, the Latin-cross-shaped second torsion-mode resonant cantilever is evaluated with ultra-high mass resolution. Therefore, the high-performance integrated micro-sensor is promising for on-the-spot bio-molecule detection.