Design, fabrication, and testing of a bistable electromagnetically actuated microvalve
Design, fabrication, and testing of a bistable electromagnetically actuated microvalve
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DOI：
10.1109/84.846698
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发表时间：
2000-06-01
影响因子：
2.7
通讯作者：
Hesketh, PJ
中科院分区：
文献类型：
--
作者：
Capanu, M;Boyd, JG;Hesketh, PJ
设计、加工和测试了一种双稳态电磁驱动微型阀。该阀门用于控制L/S水库出库水的流量，流量为1~2000pa。这两个阀门组件都是用硅制造的，上件包括一个电镀金线圈，下件是一根镍/铁合金梁。双稳能力是通过平衡梁上的弹性力和46微米厚的轧制磁箔产生的磁力来实现的。设计包括流过孔口的流动、束流运动引起的挤压膜衰减、束流弹性和电磁学，并对微阀的功耗、流量、时间响应、镍/铁合金成分和磁箔性能进行了测试。该阀门在空气和水中均以1-2伏的电压工作。
A bistable electromagnetically actuated microvalve was designed, processed, and tested. The valve was designed to control a water flow of 0.05-0.5 mu L/S from a reservoir at a pressure of 1-2000 Pa. The two valve components were fabricated in silicon, the upper piece comprises an electroplated gold coil, and the lower piece is an Ni/Fe alloy beam. The bistable capability was achieved by balancing the elastic forces on the beam with the magnetic forces due to a 46-mu m-thick rolled magnetic foil. The design includes the flow through the orifice, squeeze film damping due to beam motion, beam elasticity, and electromagnetics, The microvalve was tested for power consumption, flow rate, time response, Ni/Fe alloy composition, and magnetic foil properties. The valve operates at 1-2 V in both air and water.