Optical propagation in sheet and pattern generated films of ta(2)o(5).
Optical propagation in sheet and pattern generated films of ta(2)o(5).
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ta(2)o(5) 片状和图案生成薄膜中的光学传播。
DOI：
10.1364/ao.10.001037
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发表时间：
1971
期刊：
影响因子：
1.9
通讯作者：
P. Tien
中科院分区：
文献类型：
--
作者：
D. Hensler;J. Cuthbert;R. Martin;P. Tien
本文对Ta(2)O(5)薄膜的特性进行了研究，认为Ta(2)O(5)薄膜作为一种新型的介电介质在集成光电路中具有广泛的应用前景。讨论的Ta(2)O(5)薄膜是在氧气氛中热氧化溅射β -钽薄膜形成的。测量表明，这些薄膜将支持相干红光（6328-A.）光的传播，损耗为0.9 dB cm(-1)，相干蓝光（4880-A .）光的传播，损耗略高，为4.1 dB cm（-1）。通过测量不同模式传播时的耦合角，得到了TE和TM模式在6328 A、5145 A和4880 A时的折射率。讨论了损耗机理，表明损耗主要是由于空气-氧化物和氧化物-衬底膜表面内部反射时的散射造成的。损耗的一小部分似乎发生在薄膜内部。利用Ta(2)O(5)首次证明了利用现有薄膜技术可以形成用于集成光学的光学电路元件。基本的工艺步骤包括β - ta的图案生成，然后是图案的热氧化。介绍了直线波导和弯曲波导中传播的实验研究。结果表明，图形生成波导的损耗在5db cm（-1）到7db cm（-1）之间，其中多余的损耗是由于波导边缘的散射。结果表明，改进电路元件边界的平滑度是减少图形生成膜传输损耗的必要条件。
Attention is drawn to the properties of Ta(2)O(5) film which make it attractive as a new dielectric medium for use in integrated optical circuitry. The Ta(2)O(5) film discussed was formed by thermally oxidizing sputtered , beta-tantalum films in an oxygen atmosphere. Measurements showed that these films will support propagation of coherent red (6328-A.) light with a loss of 0.9 dB cm(-1) and coherent blue (4880-A) light with a somewhat higher loss of 4.1 dB cm(-1). From measurements of the coupling angle at which propagation of the various modes takes place, refractive indices for the TE and TM modes at 6328 A, 5145 A, and 4880 A were obtained. The loss mechanisms are discussed, and it is shown that most of the loss is due to scattering during the internal reflections at the air-oxide and oxide-substrate film surfaces. A small fraction of the loss appears to occur in the interior of the film. With Ta(2)O(5) it is demonstrated for the first time that optical circuit components can be formed for use in integrated optics by employing existing thin-film technology. The basic process steps include the pattern generation of the beta-Ta followed by thermal oxidation of the pattern. Experimental studies of propagation in straight and curved waveguides are described. It was found that the losses in pattern generated waveguides are of the order of 5 dB cm(-1) to 7 dB cm(-1), with the excess loss due to scattering from the waveguide edges. It is concluded that improvements in the smoothness of the boundaries of circuit elements are desirable to reduce transmission losses in pattern generated film.