Evaluation of Thermal Durability of Si-N-DLC Films Deposited by PBII

Evaluation of Thermal Durability of Si-N-DLC Films Deposited by PBII
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PBII 沉积 Si-N-DLC 薄膜的热耐久性评价

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通讯作者:
Chavin Jongwannasiri and Shuichi Watanabe
Chavin Jongwannasiri and Shuichi Watanabe
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作者:
Melih Anas Mohammed;Chavin Jongwannasiri and Shuichi Watanabe

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