High coercivity Sm2Fe17Nx and related phases in sputtered film samples
High coercivity Sm2Fe17Nx and related phases in sputtered film samples
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溅射薄膜样品中的高矫顽力 Sm2Fe17Nx 及相关相
DOI：
10.1063/1.353457
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发表时间：
1993
影响因子：
3.2
通讯作者：
F. Cadieu
中科院分区：
文献类型：
--
作者：
R. Rani;H. Hegde;A. Navarathna;F. Cadieu
采用射频溅射法制备了有序Sm 2Fe 17 Nx相的高矫顽力薄膜样品，其本征矫顽力iHc在293 K时高达23 kOe，在10 K时高达35 kOe。随机取向Sm 2Fe 17薄膜形成由原来的非晶沉积物的后续晶化。原始Sm 2Fe 17薄膜的iHc在293 K时为0.75 kOe。2Θ=28°至73°的X射线衍射仪迹线，CuKα显示14条线。在氮化之前，所有14条线都拟合到2-17菱形结构，其中a=8.555 A，c=12.445 A，2Θ的加权均方根偏差为0.01°。氮化后的细胞体积增加了1.7%。氮化的有序2-17薄膜必须在一个非常窄的温度范围内进行，以优化磁性能。最佳的磁性能是通过将非晶沉积物在0.900 K的温度下原位晶化1 h，然后在0.75 atm的N2气体中氮化获得的，在675-725 K温度下保温2 h。室温下的矫顽力作为Sm的函数。
High coercivity film samples of the ordered Sm2Fe17Nx phase with intrinsic coercivities, iHc, up to 23 kOe at 293 K, and 35 kOe at 10 K, were synthesized by rf sputtering. Random orientation Sm2Fe17 films were formed by the subsequent crystallization of originally amorphous deposits. The iHc of the original Sm2Fe17 films was 0.75 kOe at 293 K. X‐ray diffractometer traces from 2Θ=28° to 73°, CuKα, exhibited 14 lines. Before nitriding all 14 lines were fit to the 2–17 rhombohedral structure with a=8.555 A, c=12.445 A, with a weighted root‐mean‐square deviation in 2Θ of 0.01°. After nitriding the cell volume increase was ≊7%. Nitriding of the ordered 2–17 films had to be performed in a very narrow temperature range to optimize the magnetic properties. The best magnetic properties were obtained by crystallizing the amorphous deposits in situ at a temperature of ≊900 K for 1 h and then subsequently nitriding in N2 gas at 0.75 atm., at 675–725 K, for 2 h. The room temperature coercivity as a function of the Sm ...