Fabrication of periodic arrays of top-gathering titania-organic hybrid pillars derived from multi-beam laser interference
Fabrication of periodic arrays of top-gathering titania-organic hybrid pillars derived from multi-beam laser interference
复制标题
多束激光干涉顶聚二氧化钛有机杂化柱周期性阵列的制备
DOI：
10.1117/12.647213
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
S. Shibata
中科院分区：
文献类型：
--
作者：
H. Segawa;H. Misawa;T. Yano;S. Shibata
多光束激光干涉光刻技术是光子晶体制作技术之一。在MLI光刻中，激光束在光波长的尺度上被干涉并照射到感光膜。具有高折射率的TiO_2-有机杂化光敏薄膜受到了人们的关注。利用MLI光刻技术制备了TiO 2-有机杂化周期柱图形。采用溶胶-凝胶法制备了钛醇盐和β-二酮的TiO 2杂化薄膜，并对该薄膜进行了800 nm飞秒脉冲光干涉。激光照射后，通过显影和冲洗除去未照射部分。通过改变激光照射时间和膜厚等条件，形成了二维周期性的孤立柱和2×2、3×3的顶部聚集柱，这些柱通过自组织聚集在顶部。柱图案取决于冲洗液、柱的直径和高度。顶部聚集柱适用于衍射光学。
Multi-beam laser interference (MLI) lithography is known to be one of the fabrication techniques of photonic crystals. In MLI lithography, laser beams are interfered on a scale of the wavelength of light and are irradiated to photosensitive films. We have paid attention to photosensitive TiO2-organic hybrid film, which has high refractive index. TiO2-organic hybrid periodic pillar patterns were fabricated by MLI lithography. The TiO2 hybrid film, which was prepared from Ti-alkoxide and β-diketone by the sol-gel method, was exposed to the interference pattern of femtosecond pulses at 800 nm wavelength. After laser irradiation, the unirradated portion was removed by the development and rinse. Two-dimensional periodic standing alone pillars and 2×2 and 3×3 top-gathering pillars, which were gathered at the top by means of self-organization were formed by changing conditions such as laser irradiation time and film thickness. The pillar patterns depended upon the rinse liquid, the diameter, and the height of pillars. The top-gathering pillars are applicable for diffractive optics.