T.Ohmi; H.Kuwabara; T.Shibata; T.Kiyota: "RF-DC Coupled Mode Bias Sputtering for ULSI Metallization" To be presented at First International Symposium on Ultra Large Scale Integration Science and Technology, Philadelphia, May, 1987.(1987)
T.Ohmi; H.Kuwabara; T.Shibata; T.Kiyota: "RF-DC Coupled Mode Bias Sputtering for ULSI Metallization" To be presented at First International Symposium on Ultra Large Scale Integration Science and Technology, Philadelphia, May, 1987.(1987)
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