ANTIREFLECTION STRUCTURED SURFACES FOR THE INFRARED SPECTRAL REGION
ANTIREFLECTION STRUCTURED SURFACES FOR THE INFRARED SPECTRAL REGION
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DOI：
10.1364/ao.32.001154
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发表时间：
1993-03-01
期刊：
影响因子：
1.9
通讯作者：
MORRIS, GM
中科院分区：
文献类型：
--
作者：
RAGUIN, DH;MORRIS, GM
设计并分析了 GaAs 基板上的抗反射结构 (ARS) 表面，适用于法向入射、随机偏振、10.6 微米波长辐射。检查一维 (1-D) 和二维 (2-D) 多级轮廓，特别注意一维三角形和二维金字塔轮廓的多级近似。一维轮廓是使用二阶有效介质理论 (EMT) 设计的，因为我们发现当 ARS 表面设计用于光密材料（例如，红外光谱区域中使用的大多数材料）时，零阶 EMT 是不够的。我们通过使用严格的耦合波分析来分析一维和二维轮廓，发现轮廓包含的级别越多，ARS 表面对偏角、波长失谐和蚀刻深度误差的响应就越好。尽管一维和二维轮廓都可以有效地抑制非偏振光的反射，但当关注随机偏振光时，二维光栅具有优势。
Antireflection structured (ARS) surfaces on GaAs substrates for application with normally incident, randomly polarized, 10.6-mum-wavelength radiation are designed and analyzed. Both one-dimensional (1-D) and two-dimensional (2-D) multilevel profiles are examined with special attention given to multilevel approximations of 1-D triangular and 2-D pyramidal profiles. The 1-D profiles are designed by using second-order effective medium theory (EMT), as we have found zeroth-order EMT to be insufficient when ARS surfaces are designed for use with optically dense materials, e.g., most materials used in the infrared spectral region. We analyze both 1-D and 2-D profiles by using rigorous coupled-wave analysis and find that the more levels the profile contains, the better the ARS surface's response to bias angles, wavelength detunings, and errors in etch depth. Although both 1-D and 2-D profiles can efficiently suppress reflections for unpolarized light, 2-D gratings are advantageous when randomly polarized light is of interest.