Microfabrication Technology for Large Lekid Arrays: From Nika2 to Future Applications
Microfabrication Technology for Large Lekid Arrays: From Nika2 to Future Applications
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大型 Lekid 阵列的微加工技术：从 Nika2 到未来的应用
DOI：
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发表时间：
2015
期刊：
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通讯作者：
K. Schuster
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作者：
J. Goupy;A. Adane;A. Benoit;O. Bourrion;M. Calvo;A. Catalano;G. Coiffard;C. Hoarau;S. Leclercq;H. le Sueur;J. Macías;A. Monfardini;I. Peck;K. Schuster
集总元件动态电感探测器(LEKID)在新的IRAM KID阵列(NICA)仪器中完全成熟。这些结果允许直接将LEKID性能与毫米和亚毫米范围内的其他竞争技术(TES、掺杂硅)进行比较。目前正在继续努力改进微制造技术和概念，以满足新仪器的要求。更准确地说，未来专门用于宇宙微波背景(CMB)研究的卫星将需要相同的焦平面技术来覆盖至少60-600 GHz的频率范围。为Nika开发的铝LEKID到目前为止已经在实际望远镜条件下展示了在120-300 GHz频段内接近光子噪声限制的性能。通过实施超导双层，我们最近展示了LEKID阵列在80-120 GHz范围内工作，灵敏度接近CMB任务的目标。Nika本身(350像素)之后是一个更雄心勃勃的项目，需要数千(3000-5000)像素。NIKA2已于2015年10月安装在IRAM 30米望远镜上。我们将详细描述技术改进，这些改进允许在不降低初始灵敏度的情况下将像素数放大到相对无害的十倍。特别是，我们将简要描述一种解决方案，以简化与共面波导中的缝隙线传播模式相关联的困难的制作步骤。
The lumped element kinetic inductance detectors (LEKID) demonstrated full maturity in the New IRAM KID Arrays (NIKA) instrument. These results allow directly comparing LEKID performance with other competing technologies (TES, doped silicon) in the mm and sub-mm range. A continuing effort is ongoing to improve the microfabrication technologies and concepts in order to satisfy the requirements of new instruments. More precisely, future satellites dedicated to cosmic microwave background (CMB) studies will require the same focal plane technology to cover, at least, the frequency range of 60–600 GHz. Aluminium LEKID developed for NIKA have so far demonstrated, under real telescope conditions, a performance approaching photon noise limitation in the band 120–300 GHz. By implementing superconducting bi-layers, we recently demonstrated LEKID arrays working in the range 80–120 GHz and with sensitivities approaching the goals for CMB missions. NIKA itself (350 pixels) is followed by a more ambitious project requiring several thousand (3000–5000) pixels. NIKA2 has been installed in October 2015 at the IRAM 30-m telescope. We will describe in detail the technological improvements that allowed a relatively harmless tenfold up-scaling in pixels count without degrading the initial sensitivity. In particular, we will briefly describe a solution to simplify the difficult fabrication step linked to the slot-line propagation mode in coplanar waveguide.