A prototype of ultrasonic micro-degassing device for portable dialysis system
A prototype of ultrasonic micro-degassing device for portable dialysis system
复制标题
DOI：
10.1016/s0924-4247(01)00741-5
复制
发表时间：
2002-01-01
影响因子：
4.6
通讯作者：
Maeda, R
中科院分区：
文献类型：
--
作者：
Yang, Z;Matsumoto, S;Maeda, R
介绍了微型脱气器的设计、制造和评价。该装置的预期用途是在便携式透析系统中，脱气过程是基于超声诱导空化。脱气室的图案在玻璃片上形成，排气通道的图案在硅片上形成。整个流路网络被硅与玻璃晶片的阳极键合所封装。在硅侧蚀刻一个膜片（6mm x 6mm x 0.1 mm）用于振荡。超声振动源于块状压电PZT陶瓷（5 mm x 4 mm x 0.15 mm），由100 V（峰对峰）的49 kHz方波激发。采用功能性有机硅疏水钝化排气通道（2微米宽，2.7微米深）。当PZT驱动硅振膜时，在脱气室（6mm x 6mm x 0.02 mm）中出现空化现象。用水来演示脱气过程。整个过程用装有摄像机的显微镜记录下来。气泡排出有效，无气泡随水从脱气室流出。38%的溶解氧被去除。(C) 2002 Elsevier Science B.V.版权所有
The design, fabrication and evaluation of a micro-degasser are described. The intended use of the device is in portable dialysis systems, Degassing processes were based on ultrasound induced cavitation. The pattern of the degassing chamber was formed in a glass wafer and that of the gas-venting channels were formed in a silicon wafer. The entire flow path network was encapsulated by the anodic bonding of the Si to the glass wafer. A diaphragm (6 mm x 6 mm x 0.1 mm) was etched on the Si side for oscillation. The ultrasonic vibration originated from a bulk piezoelectric PZT ceramic (5 mm x 4 mm x 0.15 mm) which was excited by a 49 kHz square wave at 100 V (peak-to-peak). The gas-venting channels (2 mum wide and 2.7 mum deep) were hydrophobically passivated using a functional silicone. Cavitation occurred in a degassing chamber (6 mm x 6 mm x 0.02 mm) when the Si oscillating diaphragm was driven by the PZT. Water was used to demonstrate the degassing process. The entire process was recorded using a microscope equipped with a video camera. The gas bubbles were vented effectively and no gas bubble flowing out of the degassing chamber with water was observed. Thirty-eight percent of the dissolved oxygen was removed. (C) 2002 Elsevier Science B.V. All rights reserved.