Volume measurement based on dynamic differential pressure decay using AAO leak element
Volume measurement based on dynamic differential pressure decay using AAO leak element
复制标题
使用 AAO 泄漏元件进行基于动态压差衰减的体积测量
DOI：
10.1016/j.vacuum.2019.108887
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发表时间：
2019
期刊：
影响因子：
4
通讯作者：
Xudi Wang
中科院分区：
文献类型：
--
作者：
Dexue You;Wang Yongjian;Zhenhua Yu;Yan Zhao;Zhenhua Xi;Yongjun Cheng;Lichen Sun;Donghui Meng;Xudi Wang
摘要提出了一种利用阳极氧化铝（AAO）泄漏元件动态压差衰减原理测量金属容器容积的新技术。选择AAO作为泄漏元件是因为其电导从真空到大气保持恒定。待测容器通过AAO泄漏元件连接到真空系统。测量了AAO漏孔组件进出口动态压差随时间的衰减规律，并进行了指数函数拟合和容积计算。使用这种方法分别用氮气、氦气和氩气获得了两个不同容器的体积。讨论了真空和常压出口条件下温度波动对实验结果的影响。在真空出口条件下，单次实验中压力衰减引起的温度变化很小，满足等温假设，温度波动对实验结果的影响可以忽略。与静态膨胀法的初步比较结果表明，这种新的体积测量技术是准确的，简单和有效的。
Abstract A new technique to measure the volume of the metal container based on dynamic differential pressure decay by using anodic aluminum oxide (AAO) leak element is presented. The AAO is chosen as the leak element because its conductance remains constant from vacuum to atmosphere. The container to be measured is connected to the vacuum system via the AAO leak element. The dynamic differential pressure decay with time between the inlet and outlet of AAO leak assembly was measured and fitted by an exponential function, followed by volume calculation. The volume of two different containers has been obtained using this method with nitrogen, helium, and argon, respectively. The influence of temperature fluctuation on experimental results under vacuum and atmospheric pressure outlet conditions was discussed. For vacuum outlet conditions, the temperature change caused by pressure decay in one single experiment is small enough to satisfy the isothermal hypothesis, which makes the influence of temperature fluctuation on the experimental results negligible. The preliminary results compared with the static expansion method demonstrate that this novel volume measurement technique is accurate, simple and efficient.