Achromatic Deep Ultraviolet Lens Using Novel Optical Materials
Achromatic Deep Ultraviolet Lens Using Novel Optical Materials
复制标题
采用新型光学材料的消色差深紫外透镜
DOI：
10.1002/pssb.201900480
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
and M. Kiyohara
中科院分区：
文献类型：
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作者：
Y. Minami;M. Cadatal-Raduban;K. Kuroda;K. Shinohara;Y. Lai;K. Yamanoi;N. Sarukura;T. Shimizu;R. Ishii;Y. Kawakami;N. Kabasawa;T. Amano;K. Kiyohara;and M. Kiyohara
报道了深紫外（DUV）区域消色差透镜的研制。在200至300 nm的波长范围内研究了氟化锂钙铝（LiCaAlF6）、氟化镁（MgF2）、氟化锂（LiF）、氟化钙（CaF2）和熔融石英（SiO2）的色散和阿贝数，以确定适当的材料组合以使双重透镜中的色差最小化。基于这些研究的结果，使用LiCaAlF 6（凸透镜）SiO2（凹透镜）双合透镜制造了原型DUV物镜透镜。物镜透镜的焦距为10 mm，工作距离为2 mm，数值孔径（NA）为0.2。评价物镜透镜具有约2.8%的色差和至少2 μm的分辨率。与具有类似NA的反射物镜透镜相比，还评估了具有较小的球面像差。
The development of an achromatic lens in the deep ultraviolet (DUV) region is reported. The dispersion and Abbe numbers of lithium calcium aluminum fluoride (LiCaAlF6), magnesium fluoride (MgF2), lithium fluoride (LiF), calcium fluoride (CaF2), and fused silica (SiO2) are investigated in the wavelength range from 200 to 300 nm to determine appropriate material combinations for minimizing chromatic aberration in a doublet. Based on the results of these investigations, a prototype DUV objective lens is fabricated using a LiCaAlF6(convex lens)SiO2(concave lens) doublet. The objective lens has a focal length of 10 mm, working distance of 2 mm, and numerical aperture (NA) of 0.2. The objective lens is evaluated to have a chromatic aberration of about 2.8% and resolution of at least 2 μm. It is also evaluated to have a smaller spherical aberration compared with a reflective objective lens with a similar NA.