Three-dimensional nanostructure determination from a large diffraction data set recorded using scanning electron nanodiffraction.
Three-dimensional nanostructure determination from a large diffraction data set recorded using scanning electron nanodiffraction.
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DOI：
10.1107/s205225251600943x
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发表时间：
2016-09-01
期刊：
影响因子：
3.9
通讯作者：
Zuo JM
中科院分区：
文献类型：
--
作者：
Meng Y;Zuo JM
提出了一种确定单相和纳米晶材料三维晶粒形态和取向的通用方法。提出了一种基于衍射的三维纳米结构测定技术。该技术采用高分辨率和低剂量扫描电子纳米衍射（SEND）技术，借助特殊的样品支架进行大角度旋转，获得三维衍射图。根据晶体取向和记录的衍射图重建的暗场图像在三维空间中识别晶粒。在纳米晶TiN薄膜上的应用表明，在给定的先验条件下，利用代数迭代算法可以重建直径为数十纳米的柱状TiN晶粒的三维形貌及其晶体取向。这些原理也可以推广到多相纳米晶材料中。因此，层析SEND技术提供了一种有效和自适应的方法来确定三维纳米结构。
A general approach is developed to determine three-dimensional grain morphology and orientation in single-phase and nanocrystalline materials. A diffraction-based technique is developed for the determination of three-dimensional nanostructures. The technique employs high-resolution and low-dose scanning electron nanodiffraction (SEND) to acquire three-dimensional diffraction patterns, with the help of a special sample holder for large-angle rotation. Grains are identified in three-dimensional space based on crystal orientation and on reconstructed dark-field images from the recorded diffraction patterns. Application to a nanocrystalline TiN thin film shows that the three-dimensional morphology of columnar TiN grains of tens of nanometres in diameter can be reconstructed using an algebraic iterative algorithm under specified prior conditions, together with their crystallographic orientations. The principles can be extended to multiphase nanocrystalline materials as well. Thus, the tomographic SEND technique provides an effective and adaptive way of determining three-dimensional nanostructures.