High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
复制标题
DOI：
10.1117/12.522918
复制
发表时间：
2004-04
期刊：
影响因子：
--
通讯作者：
X. Shan;Y. Murakoshi;Zhenfeng Wang;H. Lu;Yufeng Jin;T. Ikehara;R. Maeda;C. Wong
中科院分区：
文献类型：
--
作者：
X. Shan;Y. Murakoshi;Zhenfeng Wang;H. Lu;Yufeng Jin;T. Ikehara;R. Maeda;C. Wong
In micro fabricated gas turbine engine, a micro journal air bearing is used to offer high speed and low wear operations. Fabrication of such a journal bearing is a critical challenge since the clearance of the bearing is only several micrometers with aspect ratio of more than 20. This paper reports on the fabrication of ultra-high aspect ratio micro journal air bearing using ICP DRIE (inductively coupled plasma deep reactive ion etching) process. The process parameters that resulted in bowed and tpaered journal bearing were investigated to improve the profile of the etched journal bearing. Micro journal bearings with sidewall verticality of almost 90° were obtained.
