Vacuum characteristics of titanium
Vacuum characteristics of titanium
复制标题
钛的真空特性
DOI：
10.1116/1.579781
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
Y. Itoh
中科院分区：
文献类型：
--
作者：
M. Minato;Y. Itoh
超高真空（UHV）和极高真空（XHV）腔室的材料，除了不锈钢和铝合金外，很少有人关注其他金属。钛是另一种用于特高压和特高压应用的候选材料。为了获得钛在特高压和特高压中应用的基础数据，制作了一种电导调制法的放气速率测量装置。在小样品放气速率的测量中，发现钛的放气速率比不锈钢的快1.5倍。此外，发现TiN涂层可以将钛的总放气量从1.78×10−2减少到1.17×10−2 Pa m3，在不锈钢的测量中从1.02×10−1减少到9.22×10−3 Pa m3。在对样品气体的质量分析中，化学抛光钛、化学抛光和TiN涂层钛以及TiN涂层不锈钢的氢离子电流在…
Little attention has been paid to metals other than stainless steels and aluminum alloys as materials for ultrahigh vacuum (UHV) and extremely high vacuum (XHV) chambers. Titanium is another candidate material for use in UHV and XHV applications. To obtain basic data for the application of titanium to UHV and XHV, an apparatus employing the conductance modulation method was fabricated for the measurement of the outgassing rate. In the measurement of the outgassing rate of small samples, it was found that the outgassing rate of titanium decreased 1.5 times faster than that of stainless steel. Furthermore, a TiN coating was found to reduce the total amount outgassed from 1.78×10−2 to 1.17×10−2 Pa m3 in the measurement of titanium and from 1.02×10−1 to 9.22×10−3 Pa m3 in the measurement of stainless steel. In a mass analysis of the gases from the samples, the ion current of hydrogen from chemically polished titanium, chemically polished and TiN‐coated titanium, and TiN‐coated stainless steel decreased after ...