Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process
Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process
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DOI：
10.7567/1347-4065/ab0fee
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发表时间：
2019-06-01
影响因子：
1.5
通讯作者：
Takao, Yoshinori
中科院分区：
文献类型：
--
作者：
Inoue, Naoki;Nagao, Masayoshi;Takao, Yoshinori
为了提高使用离子液体作为推进剂的电喷雾推进器的推力密度，我们利用场发射器阵列（FEA）或门控纳米电子源的制造技术制造了高密度发射器阵列。发射器阵列的密度可达约400万厘米(-2)，比传统电喷雾推进器高四个数量级。通过从与 FEA 相同结构的背面进行深度反应离子蚀刻，并用稀硝酸去除其 Ni 锥体，我们成功地制造了亚微米级毛细管发射器，其后面带有自对准提取电极和离子液体储存器。还使用 EMI-BF4 和 EMI-DCA 作为推进剂进行电流测量。虽然离子由于与电极发生电化学反应而未被 EMI-BF4 提取，但使用 EMI-DCA 检测到正离子电流和负离子电流，其中电流密度超过了传统电喷雾推进器。 (C) 2019 日本应用物理学会
To improve the thrust density of electrospray thrusters using ionic liquids as the propellant, we have fabricated a high-density emitter array utilizing the fabrication technique of a field emitter array (FEA) or gated nano electron sources. The density of the emitter array can reach approximately 4 million cm(-2), which is four orders of magnitude higher than that of conventional electrospray thrusters. Performing deep reactive ion etching from the back side of the same structure as FEAs and removing their Ni cones by dilute nitric acid, we have successfully fabricated sub-mu m scale capillary emitters with self-aligned extractor electrodes and ionic liquid reservoirs behind them. Current measurements were also conducted with EMI-BF4, and EMI-DCA as the propellant. Although the ion was not extracted with EMI-BF4 owing to its electrochemical reaction with the electrodes, both positive and negative ion currents were detected using EMI-DCA, where the current density exceeded that of conventional electrospray thrusters. (C) 2019 The Japan Society of Applied Physics