Direct writing of three-dimensional Cu-based thermal flow sensors using femtosecond laser-induced reduction of CuO nanoparticles
Direct writing of three-dimensional Cu-based thermal flow sensors using femtosecond laser-induced reduction of CuO nanoparticles
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DOI：
10.1088/1361-6439/aa6820
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发表时间：
2017-05-01
影响因子：
2.3
通讯作者：
Hata, S.
中科院分区：
文献类型：
--
作者：
Arakane, S.;Mizoshiri, M.;Hata, S.
我们已经演示了利用飞秒激光诱导还原CuO纳米颗粒制备富cu和富cu20微加热器的两种类型的热流传感器。微加热器的形状为微桥结构，通过四层逐层的二维微图层压与衬底热隔离。首先，我们对三维富cu和富cu20微结构的选择性制备进行了图图化性能评估，如点胶涂层条件和还原程度。然后，在相应的激光照射条件下，制备了富cu微加热器热膜流量传感器和富cu20微加热器热膜流量传感器。带有富铜微桥单加热器的热膜传感器使我们能够在0-450 cc min（-1）的宽范围内测量流速。虽然富cu20微桥加热器对温度的依赖性较大，导致单加热器热膜流量传感器误差较大，但其耐热性较高，且驱动功率较低。富cu20微结构的电阻温度系数绝对值小于-4.6 x 10（-8）°C-1，具有半导体性质。富cu20微结构具有较高的温度灵敏度，有利于热检测。基于这些优点，提出并制作了一种由富cu20微桥单加热器和两个富cu20热探测器组成的量热流量传感器。量热式流量传感器由测量温差的电路驱动。富cu20流量传感器可以检测双向流量，输出误差小。
We have demonstrated the fabrication of two types of thermal flow sensors with Cu-rich and Cu2O-rich microheaters using femtosecond laser-induced reduction of CuO nanoparticles. The microheaters in the shape of microbridge structures were formed to thermally isolate from the substrates by four layer-by-layer laminations of two-dimensional micropatterns. First, we evaluated the patterning properties such as dispensing coating conditions and degree of reduction for the selective fabrication of three-dimensional Cu-rich and Cu2O-rich microstructures. Then, a hot-film flow sensor with a Cu-rich microheater and a calorimetric flow sensor with a Cu2O-rich microheater were fabricated using their respective appropriate laser irradiation conditions. The hot-film sensor with the Cu-rich microbridge single heater enabled us to measure the flow rate in a wide range of 0-450 cc min(-1). Although a large temperature dependence of the Cu2O-rich microbridge heaters caused a large error for the hot-film flow sensors with single heaters, they showed higher heat-resistance and generated heat with a lower drive power. The temperature coefficient of resistance of the Cu2O-rich microstructures had a semiconductor-like large absolute value and was less than -4.6 x 10(-8) degrees C-1. The higher temperature sensitivity of the Cu2O-rich microstructures was useful for thermal detection. Based on these advantages, a calorimetric flow sensor composed of the Cu2O-rich microbridge single heater and two Cu2O-rich thermal detectors was proposed and fabricated. The calorimetric flow sensor was driven by a circuit for measuring the temperature difference. The Cu2O-rich flow sensor could detect bi-directional flow with a small output error.