ANALYSIS OF STRAY CAPACITANCE IN THE KELVIN METHOD
ANALYSIS OF STRAY CAPACITANCE IN THE KELVIN METHOD
复制标题
DOI：
10.1063/1.1142075
复制
发表时间：
1991-03-01
影响因子：
1.6
通讯作者：
ESTRUP, PJZ
中科院分区：
文献类型：
--
作者：
BAIKIE, ID;VENDERBOSCH, E;ESTRUP, PJZ
我们对开尔文探针电路进行了理论分析，同时考虑了连接电缆引起的并联电容和边缘场。 我们证明了一个简单的明确的解决方案，低调制指数的λ，并提出了一个优化的检测方法，λ接近统一。 我们扩展的分析，包括静态和振动板的寄生电容（SPE，VPE）配置和检查的变化，在表观接触电位差V（应用程序）作为开尔文探针的平均间距的函数。 该分析主要用于特高压应用，在这些应用中，由于系统内的连接电缆或非理想的系统配置（例如，由样品安装约束所施加的，是不平凡的。 使用专门开发的计算机操纵开尔文探针和屏蔽电位V（s）耦合到数据采集系统（DAS），我们已经测试了上述模型。 我们发现V（app）与V（s）呈线性关系，并且在SPE和VPE配置中随平均间距呈二次曲线变化。 在后一种情况下，影响要小得多;然而，在亚meV操作时必须考虑到这一点。
We present a theoretical analysis of the Kelvin probe circuit taking into account both the parallel capacity induced by the connecting cables and fringing fields. We demonstrate a simple explicit solution for low modulation index epsilon and suggest an optimized detection method for epsilon close to unity. We extend the analysis to include stray capacitance terms for both the static- and vibrating-plate earthed (spe, vpe) configurations and examine the variation in apparent contact potential difference V(app) as a function of the Kelvin probe mean spacing. This analysis is primarily intended for UHV applications where shielding problems, due either to connecting cables within the system or nonideal system configurations, e.g., imposed by sample mounting constraints, are nontrivial. Using a specially developed computer-steered Kelvin probe and shield potential V(s) coupled to a data acquisition system (DAS) we have tested the above model. We find V(app) to be linear with V(s) and varies quadratically with mean spacing in both spe and vpe configurations. In the latter case the effect was much smaller; however, it must be taken into account for sub-meV operation.