Nanoscale investigation of hydrogen-induced degradation mechanism in Pt/(Pb, La)(Zr, Ti)O3/Pt capacitors
Nanoscale investigation of hydrogen-induced degradation mechanism in Pt/(Pb, La)(Zr, Ti)O3/Pt capacitors
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Pt/(Pb, La)(Zr, Ti)O3/Pt 电容器氢致降解机制的纳米级研究
DOI：
10.1063/1.1398317
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发表时间：
2001
影响因子：
4
通讯作者：
K. Takasaki
中科院分区：
文献类型：
--
作者：
C. Yoshida;T. Tamura;Kazuaki Kondo;K. Takasaki
使用原子力显微镜压电测量研究了氢对 Pt/(Pb, La)(Zr, Ti)O3(PLZT)/Pt 电容器的影响。研究表明，电容器由亚微米尺寸的铁电域组成，这些铁电域随机分布在正或负剩磁状态。氢退火后，观察到每个域的局部压电磁滞回线沿电压轴和极化轴移动。剩余极化的退化可以通过每个域的偏移磁滞来解释。饱和极化的退化可以理解为是由电容器内的非开关部分引起的。
The effects of hydrogen on Pt/(Pb, La)(Zr, Ti)O3(PLZT)/Pt capacitors have been investigated using atomic force microscopy piezoelectric measurements. The study revealed that the capacitors consist of submicron-sized ferroelectric domains, which were randomly distributed at positive or negative remanent states. After hydrogen annealing, it was observed that the local piezoelectric hysteresis loops of each domain shifted along both the voltage axis and the polarization axis. The degradation of remanent polarization can be explained by the shifted hysteresis of each domain. The degradation of saturation polarization can be understood to have been caused by the nonswitching portion within the capacitor.