Casimir effect on the pull-in parameters of nanometer switches
Casimir effect on the pull-in parameters of nanometer switches
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DOI：
10.1007/s00542-004-0411-6
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发表时间：
2005-02-01
影响因子：
2.1
通讯作者：
Zhao, YP
中科院分区：
文献类型：
--
作者：
Lin, WH;Zhao, YP
研究了纳机电开关临界吸合间隙和吸合电压的Casimir效应。利用微扰理论给出了考虑Casimir力时临界吸合间隙的近似解析表达式。数值计算了相应的吸合参数，从中可以看出Casimir力对吸合参数的非线性影响。提出了脱层长度随梁厚度的增加而增加的计算公式。
Casimir effect on the critical pull-in gap and pull-in voltage of nanoelectromechanical switches is studied. An approximate analytical expression of the critical pull-in gap with Casimir force is presented by the perturbation theory. The corresponding pull-in parameters are computed numerically, from which one can notice the nonlinear effect of Casimir force on the pull-in parameters. The detachment length has been presented, which increases with increasing thickness of the beam.