CrAlYN/CrN superlattice coatings deposited by the combined high power impulse magnetron sputtering/unbalanced magnetron sputtering technique
CrAlYN/CrN superlattice coatings deposited by the combined high power impulse magnetron sputtering/unbalanced magnetron sputtering technique
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DOI：
10.1016/j.surfcoat.2006.08.027
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发表时间：
2006-12
影响因子：
5.4
通讯作者：
P. Hovsepian;C. Reinhard;A. Ehiasarian
中科院分区：
文献类型：
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作者：
P. Hovsepian;C. Reinhard;A. Ehiasarian
CrAlYN/CrN涂层代表了新一代无钛PVD涂层，专门用于高温应用，如干式高速加工和保护特殊等级航空航天和汽车合金免受环境侵蚀。新型高功率脉冲磁控溅射（HIPIMS）技术用于基板预处理（蚀刻），然后利用非平衡磁控溅射（UBM）进行涂层沉积。在LC=65 N的M2高速钢上，采用HIPIMS可获得表面光滑（Ra=0.036 μm）、附着力良好的薄膜，并具有典型的划痕附着临界载荷值。低角XRD分析表明，涂层具有纳米多层（超晶格）结构，典型的双层厚度为4 nm。XTEM观察证实了这一结果，并进一步揭示了由于HIPIMS蚀刻导致的涂层的致密的无生长缺陷结构。CrAlYN/CrN结合了HK0.025=3320的高硬度和0.5的低摩擦系数以及3.7×10− 17 m3 N − 1 m −2的极低滑动磨损系数，这与TiAlN/VN和Me-Carbon薄膜相当。在硬化A2工具钢（HRC=58）的干式高速铣削（V切削=385 m min−1）中，涂有CrAlYN/CrN涂层的8 mm硬质合金球头端米尔斯的性能优于TiAlCrYN，后者是专门用于该应用的市场领先涂层之一。当在切削速度范围的高端500 m min− 1进行测试时，这种性能差异变得更加明显（使用寿命延长8倍），这证明了CrAlYN/CrN的卓越品质。
CrAlYN/CrN coatings represent a new generation Ti-free PVD coatings tailored to serve high temperature applications such as dry high speed machining and protection of special grades aerospace and automotive alloys against environmental attack. The novel High Power Impulse Magnetron Sputtering (HIPIMS) technique was used for substrate pre-treatment (etching) followed by coating deposition utilising Unbalanced Magnetron Sputtering (UBM). The employment of HIPIMS resulted in smooth (Ra=0.036 μm) and well adherent films with typical scratch adhesion critical load values on M2 high speed steel of LC=65 N. Low-angle XRD analysis showed that the coating has a nanoscale multilayer (superlattice) structure with a typical bi-layer thickness of 4 nm. XTEM observations confirmed this result and further revealed the dense, growth defect free structure of the coating due to the HIPIMS etching. CrAlYN/CrN combines high hardness of HK0.025=3320 with a low coefficient of friction of 0.5 and an exceptionally low sliding wear coefficient of 3.7×10−17m3N−1m−2, which is comparable to that of TiAlN/VN and Me-Carbon films. In dry high speed milling (Vcutting=385 m min−1) of hardened A2 tool steel (HRC=58), 8 mm cemented carbide ball nosed end mills coated with CrAlYN/CrN outperformed TiAlCrYN, which is one of the market leading coatings dedicated to this application. When the test is carried out at the higher end of the cutting speed range of 500 m min−1this difference in performance becomes even more pronounced (factor of 8 longer life time), which demonstrates the excellent quality of CrAlYN/CrN.