Graphene nanopattern as a universal epitaxy platform for single-crystal membrane production and defect reduction
Graphene nanopattern as a universal epitaxy platform for single-crystal membrane production and defect reduction
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DOI：
10.1038/s41565-022-01200-6
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发表时间：
2022-09-22
影响因子：
38.3
通讯作者：
Kim, Jeehwan
中科院分区：
文献类型：
--
作者：
Kim, Hyunseok;Lee, Sangho;Kim, Jeehwan
单晶材料的异构集成为先进的器件平台和功能系统提供了巨大的机会。尽管通过异质外延技术对有源器件层进行了大量的共积，但晶格极性和晶格常数的不匹配限制了生长材料的质量2。另一方面，层转移方法作为一种替代方法，受到可转移材料的有限可用性和与转移过程有关的障碍的影响。在这里，我们介绍了石墨烯纳米模式作为一种先进的异质集成平台，允许创建广泛的独立单晶膜，大大减少了缺陷，范围从非极性材料到极性材料，从低带隙到高带隙半导体。此外，由于石墨烯纳米模式的灵活性和化学惰性，我们揭示了显著减少晶格和极性错配异质外延系统中错配位错、螺纹位错和反相边界等晶体缺陷的独特机制。更重要的是，我们发展了一个全面的力学理论来精确地引导裂缝穿过石墨烯层，并证明了在石墨烯纳米图案上生长的任何外延覆盖层的成功剥落。因此，这种方法有可能通过扩大材料的选择和提供设计异质集成系统的灵活性来彻底改变不同材料的异质集成。
Heterogeneous integration of single-crystal materials offers great opportunities for advanced device platforms and functional systems'. Although substantial efforts have been made to co-integrate active device layers by heteroepitaxy, the mismatch in lattice polarity and lattice constants has been limiting the quality of the grown materials 2 . Layer transfer methods as an alternative approach, on the other hand, suffer from the limited availability of transferrable materials and transfer-process-related obstacles 3 . Here, we introduce graphene nanopatterns as an advanced heterointegration platform that allows the creation of a broad spectrum of freestanding single-crystalline membranes with substantially reduced defects, ranging from non-polar materials to polar materials and from low-bandgap to high-bandgap semiconductors. Additionally, we unveil unique mechanisms to substantially reduce crystallographic defects such as misfit dislocations, threading dislocations and antiphase boundaries in lattice- and polarity-mismatched heteroepitaxial systems, owing to the flexibility and chemical inertness of graphene nanopatterns. More importantly, we develop a comprehensive mechanics theory to precisely guide cracks through the graphene layer, and demonstrate the successful exfoliation of any epitaxial overlayers grown on the graphene nanopatterns. Thus, this approach has the potential to revolutionize the heterogeneous integration of dissimilar materials by widening the choice of materials and offering flexibility in designing heterointegrated systems.