High resolution characterizations of fine structure of electric devices and materials using scanning nonlinear dielectric microscopy
High resolution characterizations of fine structure of electric devices and materials using scanning nonlinear dielectric microscopy
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使用扫描非线性介电显微镜对电子器件和材料的精细结构进行高分辨率表征
DOI:
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发表时间:
2019
期刊:
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通讯作者:
Yasuo Cho
中科院分区:
文献类型:
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作者:
Ogino Yukiko;Sakamoto Hirotaka;Watanabe Eiji;Ansai Satoshi;Naruse Kiyoshi;Iguchi Taisen;Yasuo Cho