Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance
Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance
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DOI：
10.1016/j.ssi.2011.01.006
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发表时间：
2011-03-25
影响因子：
3.2
通讯作者：
Levasseur, A.
中科院分区：
文献类型：
--
作者：
Fleutot, B.;Pecquenard, B.;Levasseur, A.
采用射频溅射法在Li（3）PO（4）靶上通过改变氮气流量制备了非晶锂磷氧氮化物（LiPON）固体薄膜。本研究的目的是建立沉积条件，组合物，局部结构和电解质的电性能（离子电导率和活化能）之间的相关性。正如预期的那样，LiPON薄膜的离子电导率随着氮气流量的增加而增加，达到最大值3.10（-6）S cm（-1），而活化能达到最小值0.57 eV。使用三个互补的技术，X射线光电子能谱，拉曼光谱和核磁共振允许的局部结构的LiPON薄膜的彻底调查。取代磷-氧键的磷-氮键的形成涉及两种氮原子（N1：连接到两个磷原子的氮原子（-N=），和N2：连接到三个磷原子的氮原子（-N
Amorphous thin solid films of lithium phosphorus oxynitride (LiPON) were prepared by radio-frequency sputtering from a Li(3)PO(4) target by varying nitrogen flow rate. The aim of this study is to establish the correlations between deposition conditions, composition, local structure and the electrical properties of the electrolyte (ionic conductivity and activation energy). As expected, ionic conductivity of LiPON thin films increases with nitrogen flow rate reaching a maximum of 3.10(-6) S cm(-1) while the activation energy reaches a minimum of 0.57 eV. The use of three complementary techniques, X-ray photoelectron spectroscopy, Raman spectroscopy and Nuclear Magnetic Resonance has allowed a thorough investigation of the local structure of the LiPON thin films. The formation of phosphorus-nitrogen bonds in place of phosphorus-oxygen bonds involves two kinds of nitrogen atoms (N1: a nitrogen atom linked to two phosphorus atoms (-N=), and N2: a nitrogen atom linked to three phosphorus atoms (-N