Vacuum-ultraviolet laser absorption spectroscopy for absolute measurement of fluorine atom density in fluorocarbon plasmas
Vacuum-ultraviolet laser absorption spectroscopy for absolute measurement of fluorine atom density in fluorocarbon plasmas
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真空紫外激光吸收光谱法绝对测量碳氟化合物等离子体中的氟原子密度
DOI：
10.1063/1.123861
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发表时间：
1999
影响因子：
4
通讯作者：
Hideaki Kamisugi
中科院分区：
文献类型：
--
作者：
K. Tachibana;Hideaki Kamisugi
利用真空紫外（VUV）激光吸收技术在氟碳等离子体中测量了氟原子的绝对密度。利用双光子共振四波混频技术，在Xe气体中产生了可调谐约95 nm的VUV激光，覆盖F原子的共振谱线。在该方法中，可以通过波长扫描消除等离子体中产生的母气体和物质的背景吸收，并且可以通过集成吸收谱线精确地推导出F原子的绝对密度。密度的测量值从1×1011到4×1012 cm−3不等，这取决于源气体种类和电感耦合射频（400 kHz）放电的工作条件。
Absolute density measurement of fluorine atoms has been performed by a vacuum-ultraviolet (VUV) laser absorption technique in fluorocarbon plasmas. A VUV laser tunable around 95 nm covering the resonance lines of F atoms has been produced in Xe gas by a two-photon resonance four-wave-mixing technique. In this method, the background absorption by the parent gases and species produced in the plasma can be eliminated by scanning the wavelength, and the absolute density of F atoms can be derived accurately from the integrated absorption line profile. The measured values of the density varied from 1×1011 to 4×1012 cm−3, depending on the source gas species and the operating conditions of an inductively coupled radio-frequency (400 kHz) discharge.