Analysis of optical configurations for ESPI

Analysis of optical configurations for ESPI
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DOI:
10.1016/j.optlaseng.2007.07.002
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发表时间:
2008
影响因子:
4.6
通讯作者:
Amalia G. Martinez;J. Rayas;R. Cordero;K. Genovese
Amalia G. Martinez;J. Rayas;R. Cordero;K. Genovese
中科院分区:
工程技术2区
文献类型:
--
作者:
Amalia G. Martinez;J. Rayas;R. Cordero;K. Genovese

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由三个照明和一个参考光束的组合组成的ESPI光学布置与具有对应于平面外和两个平面内干涉仪的三个光学臂的系统进行比较。两个系统获得的位移矢量的每个组件的实验数据,并进行了讨论。
An ESPI optical arrangement consisting of a combination of three illumination and one reference beams is compared to a system with three optical arms corresponding to an out-of-plane and two in-plane interferometers. Experimental data for each component of the displacement vector obtained with both systems are presented and discussed.