Sputtered SrxNbO3 as a UV transparent conducting film.

Sputtered SrxNbO3 as a UV transparent conducting film.
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溅射 SrxNbO3 作为紫外透明导电薄膜。

DOI:
10.1021/acsami.0c04854
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发表时间:
2020
影响因子:
9.5
通讯作者:
R. Engel
R. Engel
中科院分区:
材料科学2区
文献类型:
--
作者:
J. Roth;A. Paul;Nathan Goldner;A. Pogrebnyakov;Kleyser Agueda;T. Birol;N. Alem;R. Engel

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当利用传统方法简并掺杂带隙大于 ZnO 或 In2O3 的半导体时,将透明电极的应用空间扩展到紫外范围已发现具有挑战性。这里表明,x<1 的相关金属 SrxNbO3 非常适合作为紫外线透明电极材料,使紫外线发光二极管能够用于从水消毒到聚合物固化的广泛应用。结果表明,SrxNbO3 薄膜可以通过射频溅射生长,并且尽管存在相当大的 Sr 缺陷,但它们仍保持钙钛矿相。对电气和光学特性进行了表征,并与常用的 ITO 和掺锡 Ga2O3 透明导体标准进行了比较。研究发现 SrxNbO3 薄膜的方块电阻低至 30 Ohm/sq。在280 nm波长下的光透射率高达86%,比传统的紫外透明导体的性能提高了两个数量级。SrxNbO3与透明导体涂层行业广泛采用的物理气相沉积技术的兼容性,以及高导电性和光学透明的钙钛矿相的鲁棒性,使其成为紫外光谱应用的理想透明电极。
Expanding the application space of transparent electrodes towards the ultraviolet range has been found challenging when utilizing the conventional approach to degenerately dope semiconductors with band gaps larger than ZnO or In2O3. Here it is shown that the correlated metal SrxNbO3 with x<1 is ideally suited as a UV transparent electrode material, enabling UV light-emitting diodes for a wide range of applications from water disinfection to polymer curing. It is demonstrated that SrxNbO3 thin films can be grown by RF sputtering and that they remain in the perovskite phase despite a sizeable Sr deficiency. Electrical and optical properties are characterized and compared to commonly used ITO and Sn-doped Ga2O3 transparent conductor standards. SrxNbO3 films were found to have sheet resistances as low as 30 Ohm/sq. with optical transmission at a wavelength of 280 nm up to 86%, marking a two order of magnitude increase over the performance of traditional UV transparent conductors.The compatibility of SrxNbO3 with a physical vapor deposition technique that is widely employed in the transparent conductor coating industry along with the robustness of the highly electrically conducting and optically transparent perovskite phase makes it an ideal transparent electrode for applications in the UV spectrum.
DOI: 10.1038/nmat3312
发表时间: 2012-07-01
期刊: NATURE MATERIALS
影响因子: 41.2
作者:
Xu, Xiaoxiang;Randorn, Chamnan;Irvine, John T. S.
通讯作者: Irvine, John T. S.