High-throughput manufacturing of transparent fused silica glass by injection molding and extrusion
High-throughput manufacturing of transparent fused silica glass by injection molding and extrusion
复制标题
通过注塑和挤出高通量制造透明熔融石英玻璃
DOI：
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发表时间：
2022
期刊：
影响因子：
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通讯作者：
B. Rapp
中科院分区：
文献类型：
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作者：
Markus Mader;Leonhard Hambitzer;H. Becker;F. Kotz‐Helmer;B. Rapp
由于高光学透明度与高热和化学稳定性相结合，透明熔融石英玻璃在微系统工程中的许多应用中具有很高的兴趣，特别是在微流体和微光学领域。然而，熔融二氧化硅的结构化本质上很困难，通常包括高温、复杂且有毒的蚀刻过程或耗时的研磨方案，对设计自由度和制造速度造成严重限制。因此，复杂结构的熔融石英玻璃尤其在工业规模上受到限制。我们开发了高度填充的热塑性熔融二氧化硅纳米复合材料（所谓的玻璃体），可以使用常用的高通量聚合物制造技术（如注塑成型或连续挤出）进行加工。在成型过程之后，热塑性玻璃体通过随后的脱脂和烧结转化为纯透明玻璃，从而产生具有高光学透明度（透射率> 90%）和光学表面质量（Rq < 5 nm）的高质量熔融石英玻璃。我们展示了高分辨率微结构以及复杂形状宏观组件的注塑成型，这些组件随后转化为纯熔融石英玻璃，从而首次实现了熔融石英玻璃组件的大规模市场制造，从而实现了微光学和芯片实验室设备中的大量应用。
Due to high optical transparency combined with high thermal and chemical stability transparent fused silica glass is of high interest for many applications in microsystems engineering, especially in the field of microfluidics and micro optics. However, structuring of fused silica is inherently difficult and usually includes high temperatures, complicated and toxic etching processes or time consuming grinding protocols with severe limitation to freedom of design and manufacturing speed. Thus, complex structured fused silica glass has been limited especially on the industrial scale. We developed highly filled, thermoplastic fused silica nanocomposites (so-called Glassomers), that can be processed using commonly available high-throughput polymer manufacturing technologies such as injection molding or continuous extrusion. After the shaping process the thermoplastic Glassomer is converted to pure, transparent glass by subsequent debinding and sintering yielding high-quality fused silica glass with high optical transparency (transmission >90 %) and optical surface quality (Rq < 5 nm). We show injection molding of high-resolution microstructures as well as complex shaped macroscopic components that are subsequently converted to pure fused silica glass enabling for the first time mass-market manufacturing of fused silica glass components, enabling a plethora of applications in micro optics and lab-on-a-chip devices.