Stable dynamics of micro-machined inductive contactless suspensions
Stable dynamics of micro-machined inductive contactless suspensions
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DOI：
10.1016/j.ijmecsci.2017.08.016
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发表时间：
2017-03
影响因子：
7.3
通讯作者：
K. Poletkin;Zhiqiu Lu;U. Wallrabe;J. Korvink;V. Badilita
中科院分区：
文献类型：
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作者：
K. Poletkin;Zhiqiu Lu;U. Wallrabe;J. Korvink;V. Badilita
在本文中，我们提出了一种定性方法来研究微机械感应非接触式悬架 (MIS) 的动力学和稳定性。在该方法的框架中，悬浮微型物体中的感应涡流被视为 m 涡流电路的集合。假设悬浮微物体的小位移和准静态行为，获得了 MIS 的广义模型，并使用拉格朗日-麦克斯韦形式将其表示为一组对应于刚体六个自由度的六个线性微分方程组。线性模型使我们能够研究 MIS 作为动态系统的一般稳定性特性，这些特性综合在三个主要定理中。特别是，我们证明了 MIS 中没有阻尼的稳定悬浮是不可能的。基于本文提出的方法，我们给出了设计 MIS 的一般准则。此外，我们还展示了该技术在研究对称和轴对称 MIS 设计的动力学和稳定性方面的成功应用，这两种设计均基于 3D 微线圈技术。
In this article we present a qualitative approach to study the dynamics and stability of micro-machined inductive contactless suspensions (MIS). In the framework of this approach, the induced eddy current into a levitated micro-object is considered as a collection ofm-eddy current circuits. Assuming small displacements and the quasi-static behavior of the levitated micro-object, a generalized model of MIS is obtained and represented as a set of six linear differential equations corresponding to six degrees of freedom in a rigid body by using the Lagrange-Maxwell formalism. The linear model allows us to investigate the general stability properties of MIS as a dynamic system, and these properties are synthesized in three major theorems. In particular we prove that the stable levitation in the MIS without damping is impossible. Based on the approach presented herewith, we give general guidelines for designing MIS. Additionally, we demonstrate the successful application of this technique to study the dynamics and stability of symmetric and axially symmetric MIS designs, both based on 3D micro-coil technology.