Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness
Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness
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DOI：
10.1016/j.precisioneng.2009.05.008
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发表时间：
2010-01-01
影响因子：
3.6
通讯作者：
Zeng Lijiang
中科院分区：
文献类型：
--
作者：
Kimura, Akihide;Gao, Wei;Zeng Lijiang
提出了一种两自由度直线编码器，它可以同时测量精密直线工作台沿移动轴(X轴)的位置和沿垂直于移动轴(Z轴)的轴线的直线度。二自由度直线编码器由反射式刻度光栅和光学传感头组成。在光学传感头中采用了除标尺长度以外与标尺光栅相同的参考栅格。来自两个光栅的正、负一级衍射光在光学传感头中相互叠加，产生干涉信号。光学构造以这样一种方式布置，即还可以检测每个轴上的位移方向。设计并制作了一台两自由度直线编码器样机。光传感头的尺寸约为50 mm(X)×50 mm(Y)×30 mm(Z)，栅距为1.6微米。经验证，样机的两自由度线性编码器在X轴和Z轴上都具有亚纳米分辨率。(C)2009 Elsevier Inc.保留所有权利。
This paper presents a two-degree-of-freedom (two-DOF) linear encoder which can measure the position along the moving axis (X-axis) and the straightness along the axis vertical to the moving axis (Z-axis) of a precision linear stage simultaneously. The two-DOF linear encoder is composed of a reflective-type scale grating and an optical sensor head. A reference grating, which is identical to the scale grating except the scale length, is employed in the optical sensor head. Positive and negative first-order diffracted beams from the two gratings are superposed with each other in the optical sensor head to generate interference signals. The optical configuration is arranged in such a way that the direction of displacement in each axis can also be detected. A prototype two-DOF linear encoder is designed and constructed. The size of the optical sensor head is about 50 mm (X) x 50 mm (Y) x 30 mm (Z) and the pitch of the grating is 1.6 mu m. It has been confirmed that the prototype two-DOF linear encoder has sub-nanometer resolutions in both the X- and Z-axes. (C) 2009 Elsevier Inc. All rights reserved.