Multifunctional nanomembranes self-assembled into compact rolled-up sensor–actuator devices
Multifunctional nanomembranes self-assembled into compact rolled-up sensor–actuator devices
复制标题
多功能纳米膜自组装成紧凑的卷绕传感器-执行器装置
DOI：
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发表时间：
2011
期刊：
影响因子：
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通讯作者：
O. Schmidt
中科院分区：
文献类型：
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作者：
I. Mönch;J. Schumann;M. Stockmann;K. Arndt;O. Schmidt
本文报道了一个卷起的微器件家族的功能原理，提供了实现电传感器和致动器功能的可能性，这些功能适用于微系统技术，在物理测量技术，微流体和生物医学分析领域。卷起装置的制造基于将平面二维膜转换成三维功能元件的应变驱动过程。为了实现这些卷起的结构，使用了广泛的薄膜技术方法，这是公认的。这些先进的微型器件的特点在于可以使用已建立的增材或减材薄膜技术来设计后者的内表面。在本工作中阐述的技术路线可能被用来实现微流体阀由于卷起的设备和温度敏感的水凝胶的独特性能的综合优势。由于所处理的微加热器与支撑衬底的热解耦，所获得的微器件在其一般性能方面上级常规的扁平化平面器件，特别是在热特性的动态行为方面。这是一个前瞻性的基础上的概念创建的组合传感器/执行器设备与定制的电气和热性能。
This paper reports on the functional principle for a rolled-up microdevice family providing the possibility to realise electrical sensor and actuator functions which are applicable to microsystem techniques, in the field of physical measuring techniques, microfluidics and biological–medical analytics. The fabrication of the roll-up devices is based on a strain-driven process converting a planar two-dimensional membrane into a three-dimensional functional element. For the realisation of these roll-up structures a broad spectrum of thin film technological approaches were used, which are well established. The special feature of these advanced microdevices consists in the possibility to design the latter’s inner surface using established additive or subtractive thin film techniques. The technological route elaborated in the present work could possibly be used to realise a valve for microfluidics thanks to the combined advantages of rolled-up devices and the unique properties of temperature-sensitive hydrogels. Due to the thermal decoupling of the processed microheaters from the supporting substrate the obtained microdevices obtained are superior to conventional miniaturised planar devices in their general performance, especially in respect to the dynamical behaviour of the thermal properties. This is a prospective basis for the conceptual creation of combined sensor/actuator devices with tailored electrical and thermal properties.
影响因子：
17.1
作者：
Huang, Gaoshan;Quinones, Vladimir A. Bolanos;Schmidt, Oliver G.
通讯作者：
Schmidt, Oliver G.