Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes
Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes
复制标题
利用 TM-Like 和 TE-Like 模式之间的多模干涉的硅基集成光学压力传感器
DOI：
10.1080/014680302317244807
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发表时间：
2002
影响因子：
1.7
通讯作者：
Takashi Sato
中科院分区：
文献类型：
--
作者：
M. Ohkawa;Y. Shirai;T. Goto;Seishi Sekine;Takashi Sato
本文介绍了一种利用类TM和类TE基模间干涉的硅基集成光学压力传感器。该传感器由微机械加工的矩形膜片和穿过膜片的直的聚苯乙烯光波导组成。其灵敏度在理论上是已知的强烈依赖于在膜片上的波导的位置。为了实验研究这种依赖性，我们制作了一个传感器与1.2毫米2 - 10毫米2 - 20瓦米的隔膜，在其上的波导被放置在50瓦米的间隔。对于最靠近膜片边缘的波导，测得的相位灵敏度为98 mrad/kPa。对其他波导也进行了测量。正如理论上所预期的，最大的灵敏度获得的波导最接近的边缘。
In this paper, a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachined rectangular diaphragm and a straight polystyrene optical waveguide passing over the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the position of the waveguide over the diaphragm. To experimentally investigate such dependence, we fabricated a sensor with a 1.2 mm 2 10 mm 2 20 w m diaphragm, over which waveguides were placed at 50 w m intervals. The measured phase sensitivity was 98 mrad/kPa for the waveguide nearest to the diaphragm edge. The measurement was also carried out for the other waveguides. As theoretically expected, the largest sensitivity was obtained for the waveguide nearest to the edge.