High precision mode of subaperture stitching for optical surfaces measurement
High precision mode of subaperture stitching for optical surfaces measurement
复制标题
光学表面测量的高精度子孔径拼接模式
DOI：
10.1007/s12200-013-0306-1
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发表时间：
2013
影响因子：
5.4
通讯作者：
Dongmei Zhou
中科院分区：
文献类型：
--
作者：
Huijing Zhang;Haobo Cheng;H. Tam;Yongfu Wen;Dongmei Zhou
子孔径拼接（SAS）技术为扩展相位测量干涉仪的有效孔径和动态范围提供了一种很好的方法。拼接算法的准确性成为SAS技术的关键因素。本文介绍了SAS的基本原理，讨论了SAS的四种模式。拼接实验在自主设计开发的SSI-300工作站上进行。对四种不同的拼接方法和全孔径测量进行了比较。结果表明，以近光轴子孔径为基准的全局误差平均方法具有较高的精度。
Subaperture stitching (SAS) provides us with an attractive way of extending the effective aperture and dynamic range of phase measuring interferometers. Accuracy of stitching algorithm becomes the key factor in the SAS technology. In this paper, the basic principle of SAS was introduced and four modes of SAS were discussed. The stitching experiments were done through the SSI-300 workstation designed and developed independently. There were several comparisons between the four different stitching methods and the measurement of full aperture. The results suggest that the global error averaging mode with reference of subaperture near optic axis is of high precision.