Phase equilibrium and stability of elastically stressed heteroepitaxial thin films
Phase equilibrium and stability of elastically stressed heteroepitaxial thin films
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弹性应力异质外延薄膜的相平衡和稳定性
DOI：
10.1063/1.341878
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发表时间：
1988
影响因子：
3.2
通讯作者：
C. Chiang
中科院分区：
文献类型：
--
作者：
W. C. Johnson;C. Chiang
约束晶格失配异质外延薄膜系统的热力学描述和稳定性，其中薄膜平面内的晶格参数基本上由衬底的晶格参数固定，对于二元合金和三元III-V系统进行了检查。结果表明，衬底的晶体取向和衬底和薄膜之间的晶格参数的差异可能会显着影响平衡相组成和体积分数，以及两相和三相异质外延系统中相的相对稳定性。与通常与块状相干固体相关的弹性效应不同，由基底引入的应力可以使固溶线向单相或两相区域移动，移动的幅度强烈地取决于晶体取向和应力状态。约束薄膜异质外延系统被证明是由一个特殊的子集相干应力固体系统，其中…
The thermodynamic description and stability of constrained lattice‐mismatched heteroepitaxial thin‐film systems, in which the lattice parameter in the plane of the film is essentially fixed by that of the substrate, are examined for binary alloys and ternary III‐V systems. It is shown that the crystallographic orientation of the substrate and the difference in the lattice parameter between the substrate and the thin films may significantly affect equilibrium phase compositions and volume fraction, and the relative stability of phases in two‐ and three‐phase heteroepitaxial systems. Unlike the elastic effects usually associated with bulk coherent solids, stresses introduced by the substrate can shift the solvus line towards either the single‐phase or two‐phase regions, the magnitude of the shift depending strongly on both the crystallographic orientation and state of stress. Constrained thin‐film heteroepitaxial systems are shown to comprise a special subset of coherent stressed solid systems for which the...