Liquid Metal-Based Manipulator for Microscale Handling Inside SEM
Liquid Metal-Based Manipulator for Microscale Handling Inside SEM
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DOI：
10.1109/nems.2019.8915588
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发表时间：
2019-04
期刊：
影响因子：
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通讯作者：
F. T. V. Kleist-Retzow;M. Bartenwerfer;S. Fatikow
中科院分区：
文献类型：
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作者：
F. T. V. Kleist-Retzow;M. Bartenwerfer;S. Fatikow
在本文中，演示了液态金属在微操作粘合处理中的应用。利用通过相变在液态、低附着力状态和固态、高附着力状态之间切换镓的可能性，可以调整操纵器上的力平衡。基于这种可能性，可重复的拾取和放置操作变得可行。我们提出了一种实验装置，能够使用机器人精细定位台和定制的操纵器在 SEM 内处理任意形状的物体。相变液态金属机械手用于六步拾放方法，并在实验中成功演示。对该方法的不确定性和挑战进行了一般分析，确定了所提出过程的瓶颈。
In this paper, the application of liquid metals is demonstrated in adhesive bond handling for micro-manipulation. Using the possibility to switch gallium between a liquid, low-adhesion state and a solid, high-adhesion state by phase changes enables to tune force equilibria at manipulators. Based in this possibility, reproducible pick and place operations become feasible. We present an experimental setup that is capable of handling arbitrarily shaped objects inside the SEM using robotic fine-positioning stages and a customized manipulator. A phase changing liquid-metal manipulator is used in a six-step pick and place method, that is successfully demonstrated in an experiment. A general analysis of uncertainties and challenges of this method is presented which identifies bottlenecks of the presented process.