Usage of a speckle correlation for object surface topography
Usage of a speckle correlation for object surface topography
复制标题
散斑相关性在物体表面形貌中的应用
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
M. Hrabovský
中科院分区：
文献类型：
--
作者：
P. Horváth;P. Šmíd;Petra Wagnerová;M. Hrabovský
The paper demonstrates possibility of application of the method called speckle pattern correlation for topography of the object surface under investigation. Scanning speckle pattern originating from different points of the object surface illuminated with laser beam enables to get information on height profile of the object surface in these points. This is presented on the measurement of the slope of the object surface. The principle of the presented method is shortly described including necessary equations. A possible optical set-up for the measurement of the slope of the object under investigation is designed and acquired results are presented in comparison with theoretic values.
