Precision and resolution in laser direct microstructuring with bursts of picosecond pulses
Precision and resolution in laser direct microstructuring with bursts of picosecond pulses
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DOI：
10.1007/s00339-017-1490-4
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发表时间：
2018-01-01
影响因子：
2.7
通讯作者：
Petkovsek, Rok
中科院分区：
文献类型：
--
作者：
Mur, Jaka;Petkovsek, Rok
脉冲激光源有利于各种应用，包括不同科学和工业应用中的高效材料去除。该领域的市售激光系统通常使用直径为 10-20 微米的聚焦激光束。根据不断发展的小型化趋势，我们开发了一种基于皮秒光纤激光器的系统，结合了快速光束偏转和紧密聚焦，适用于材料加工和光学应用。我们已经预测并验证了材料加工应用系统的精度、分辨率和可实现的最小特征尺寸。分析高精度激光加工的具体应用对激光器的性能要求是进一步发展该技术的重要方面。我们预测并通过实验验证了单微米尺寸特征的最大边缘粗糙度低于200 nm，包括激光的能量和定位稳定性、光束偏转、光斑间距的影响以及机械振动的有效隔离。我们已经证明，脉冲突发中的新型光纤激光器工作方式可以提高激光能量的稳定性。我们的研究结果提高了光纤激光源在材料加工应用中的潜力，并通过允许在比单脉冲状态更低的脉冲能量下工作来促进其使用。
Pulsed laser sources facilitate various applications, including efficient material removal in different scientific and industrial applications. Commercially available laser systems in the field typically use a focused laser beam of 10-20 um in diameter. In line with the ongoing trends of miniaturization, we have developed a picosecond fiber laser-based system combining fast beam deflection and tight focusing for material processing and optical applications. We have predicted and verified the system's precision, resolution, and minimum achievable feature size for material processing applications. The analysis of the laser's performance requirements for the specific applications of high-precision laser processing is an important aspect for further development of the technique. We have predicted and experimentally verified that maximal edge roughness of single-micrometer-sized features was below 200 nm, including the laser's energy and positioning stability, beam deflection, the effect of spot spacing, and efficient isolation of mechanical vibrations. We have demonstrated that a novel fiber laser operating regime in bursts of pulses increases the laser energy stability. The results of our research improve the potential of fiber laser sources for material processing applications and facilitate their use through enabling the operation at lower pulse energies in bursts as opposed to single pulse regimes.